Studies of the mechanism of boron nitride thin-film formation by means of nitrogen-argon gas mixture plasma jet
1997 ◽
Vol 120
(4)
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pp. 1-6
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1997 ◽
Vol 117
(3)
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pp. 263-268
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2012 ◽
Vol 52
(10)
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pp. 872-880
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2003 ◽
Vol 169-170
◽
pp. 613-615
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Keyword(s):